QIN Li1, HE Cheng1, YU Li-xia2, WANG Wei1, QIN Li-jun1
（1. School of Instrument and Electronics, North University of China, Taiyuan 030051, China；2. School of Information and Communication Engineering, North University of China, Taiyuan 030051, China）
Abstract： In the past, only one performance parameter was considered in the reliability estimation of micro-electro-mechanical system (MEMS) accelerometers, resulting in a one-sided reliability evaluation. Aiming at the failure condition of large range MEMS accelerometers in high temperature environment, the corresponding accelerated degradation test is designed. According to the degradation condition of zero bias and scale factor, multiple dependent reliability estimation of large range MEMS accelerometers is carried out. The results show that the multiple dependent reliability estimation of the large range MEMS accelerometers can improve the accuracy of the estimation and get more accurate results.
Key words： large range MEMS accelerometers; zero bias; scale factor; multiple dependent reliability estimation; accelerated degradation test
CLD number： TH824+.4 Document code： A
Article ID： 1674-8042（2019）01-0009-07 doi： 10.3969/j.issn.1674-8042.2019.01.002
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大量程MEMS加速度计在高温环境下的多元相依可靠性评估
秦 丽1， 何 程1， 于丽霞2， 王 威1， 秦立君1
（1. 中北大学 仪器与电子学院， 山西 太原 030051；2. 中北大学 信息与通信工程学院， 山西 太原 030051）
摘 要: 以往在进行微电子机械系统（micro-electro-mechanical system, MEMS）加速度计的可靠性评估时， 通常只考虑一种性能参数， 导致所得到的可靠性评估结果比较片面。 针对大量程MEMS加速度计在高温环境下的失效情况， 设计了相应的加速退化试验， 根据零偏和标度因数两种性能参数的退化情况对大量程MEMS加速度计进行了多元相依可靠性评估。 结果表明， 对大量程MEMS加速度计进行多元相依可靠性评估可以提高评估精度， 得到更为准确的结果。
关键词: 大量程MEMS加速度计； 零偏； 标度因数； 多元相依可靠性评估； 加速退化试验
引用格式： QIN Li, HE Cheng, YU Li-xia, et al. Multiple dependent reliability estimation of large range MEMS accelerometers in high temperature environment. Journal of Measurement Science and Instrumentation, 2019, 10(1)： 9-15. ［doi： 10.3969／j.issn.1674-8042.2019.01.002］
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