YANG Rui-feng1,2, HU Chen-hao1,2, GUO Chen-xia1,2, GAI Ting1,2, LANG Guo-wei1,2
(1. School of Instrument and Electronics, North University of China, Taiyuan 030051, China；2. Automatic Test Equipment and System Engineering Research Center of Shanxi, Taiyuan 030051, China)
Abstract： Different from the traditional contact surface topography measurement, reflective intensity-modulated fiber optic sensor (RIM-FOS) has the unique advantages of non-contact nondestructive detection. This paper briefly introduces the principle and performance of RIM-FOS for surface topography measurement and compares with several other methods of topography measurement. Based on the review of its development process, this paper summarizes and analyses the hot issues of RIM-FOS in the surface topography measurement, then predicts the future trend for a guidance of the further study.
Key words： reflective intensity-modulated fiber optic sensor (RIM-FOS); topography measurement; probe structure; interference compensation
CLD number： TP212 Document code： A
Article ID： 1674-8042（2018）01-0059-09 doi： 10.3969/j.issn.1674-8042.2018.01.008
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用于形貌测量的反射式光纤传感器研究综述
杨瑞峰1,2， 胡晨昊1,2， 郭晨霞1,2， 盖 婷1,2， 郎国伟1,2
（1. 中北大学 仪器与电子学院， 山西 太原 030051；2. 山西省自动化检测装备与系统工程技术研究中心， 山西 太原 030051）
摘 要: 区别于传统接触式表面形貌测量技术， 光纤传感器具有非接触无损检测等独特优点。 本文简要介绍了用于测量表面形貌的反射式强度调制光纤传感器（RIM-FOS）的原理及性能特点， 并与其他几种主流形貌测量方法对比。 综述其在表面形貌测量中的应用与发展过程， 分析反射式光纤传感器在表面形貌测量中热点问题的研究现状， 总结并展望今后的发展趋势。 关键词: 反射式光纤传感； 形貌测量； 探头结构； 干扰补偿
引用格式： YANG Rui-feng, HU Chen-hao, GUO Chen-xia, et al. Review of reflective fiber optic sensors for measuring surface topography. Journal of Measurement Science and Instrumentation, 2018, 9(1)： 59-67. ［doi： 10.3969／j.issn.1674-8042.2018.01.008］
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