Boris S Lunin1, Valerii A Kreisberg1, Yurii N Zhitnev1, Evgenia A Tveritinova1, Mikhail A Basarab2, Robert A Zakharyan3
(1. Department of Chemistry, M.V. Lomonosov Moscow State University, Moscow 119991, Russia;2. Department of Information Systems and Telecommunications, Bauman Moscow State Technical University, Moscow 105005, Russia;3. Tarussky Branch of A.M. Prokhorov General Physics Institute, Tarusa 249100, Russia)
Abstract： Kinetics of the formation of residual atmosphere in vacuum devices with internal adhesive joints and the application of the mass spectral and chromatographic methods to measure the specific outgassing rate of volatile compounds from the cured adhesives are considered in this paper. The outgassing comparison data for the various types of adhesives are given and the effectiveness of the outgassing of adhesive joints is demonstrated. The possible options to provide vacuum in the various devices are considered. At moderate requirements to the residual pressure (about 10-2 Pa), it is enough to degass the adhesive joints during a few hours. It is much more difficult to provide vacuum in devices with internal adhesive joints at the level of about 10-4 Pa. This requires the use of the built-in getter and the high temperature degassing. It is expedient to provide deep vacuum (10-5-10-4 Pa) in the rare-used or once-used devices by short (a few minutes) activation the built-in getters before operating the vacuum devices. This allows to remove the main residual gas hydrocarbons component from the vacuum house and provide the necessary level of vacuum for a certain interval of time.
Key words： outgassing; adhesive; vacuum device
CLD number： TB79 Document code： A
Article ID： 1674-8042（2017）04-0347-07 doi： 10.3969/j.issn.1674-8042-2017-04-007
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真空装置内部粘合接头的脱气
Boris S Lunin1, Valerii A Kreisberg1, Yurii N Zhitnev1, Evgenia A Tveritinova1, Mikhail A Basarab2, Robert A Zakharyan3
(1. 国立莫斯科大学 化学系， 莫斯科 119991；2. 莫斯科国立鲍曼技术大学 信息系统与电信系， 莫斯科 105005；3. 普罗霍洛夫普通物理研究所塔鲁萨分部， 塔鲁萨 249100)
摘要:本文讨论了有内部粘接剂的真空装置内的残余气氛形成的动力学， 以及质谱和色谱方法在测定固化胶粘剂中挥发性化合物的比气率的应用。 本文给出了各种类型的胶粘剂的脱气比较数据， 并证明了胶粘剂接头脱气的有效性。 同时也考虑了在各种设备中提供真空的可能选项。 对于残余压力(约10-2 Pa)的适当要求下， 在几个小时内就足以对粘合剂接头进行脱气。 在大约10-4 Pa压力下， 在有内部粘合接头的装置中提供真空要困难得多， 这需要使用内置的吸气剂和高温去气。 在使用真空装置之前短时间（几分钟）激活内置吸气剂， 在基本不通或曾经使用过的设备上提供深真空(10-5-10-4 Pa)是有利的。 这可以去除主要的残余碳氢化合物气体成分， 并在一定的时间间隔内提供必要的真空水平。
关键词:脱气； 粘接剂； 真空装置
引用格式：Lunin B S, Kreisberg V A, Zhitnev Y N, et al. Outgassing from internal adhesive joints of vacuum devices. Journal of Measurement Science and Instrumentation, 2017, 8(4)：347-353. ［doi： 10.3969／j.issn.1674-8042.2017-04-007］
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