Stylus deformation calibration and scale value extraction of REVO five-axis measuring system

ZHANG Hai-tao1,2, LI Xing-hua1, LIU Shu-gui1, SU Zhi-kun1

（1. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China； 2. School of Mechanical Engineering, Tianjin University, Tianjin 300072, China）

Abstract： REVOTM is a dynamic measuring head and probe system, which is designed and applied in orthogonal coordinate measuring machines (CMMs) to maximize measurement throughput whilst maintaining high system accuracy. A calibration approach to the stylus deformation of REVO head is proposed and the scale value of each CMM axis is separated from the limited data returned from the measuring system according to the application of REVO head in non-orthogonal CMM. Experiments show that the calibration method presented and extraction of scale value are of effectiveness and correctness. Results demonstrate that the maximum measurement error has decreased from 0.202 1 mm to 0.000 9 mm and the variation of scale value of each CMM axis is two orders lower after the stylus deformation is compensated.

Key words： REVO head; calibration; stylus deformation; scale value extraction

CLD number： TH721 Document code： A

Article ID： 1674-8042（2017）03-0223-0 5doi： 10.3969/j.issn.1674-80422017-03-003

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REVO五轴测量系统探针变形量标定及光栅值提取

张海涛1,2， 李杏华1， 刘书桂1， 苏智琨1

（1. 天津大学 精密测试技术及仪器国家重点实验室， 天津 300072； 2. 天津大学 机械工程学院， 天津 300072）

摘要： REVOTM是基于正交式坐标测量机设计和应用的、 能够同时实现高效高精度测量的动态测头系统。 针对REVO五轴测量系统在非正交式坐标测量机中应用的问题，  提出了REVO测头探针变形量的标定方法，  并从测量系统返回的有限数据中分离出了各主轴的光栅数据，  实现了测量点三维坐标数据的重构。 实验验证了所提出标定方法和各主轴光栅值提取的有效性和正确性。  实验结果表明，  经过探针变形量补偿后，  测量误差最大值从0.202 1 mm降低到0.000 9 mm，  所提取出的各主轴光栅值变化量降低了两个数量级。

关键词： REVO测头； 标定； 探针变形； 光栅值提取

引用格式：ZHANG Hai-tao, LI Xing-hua, LIU Shu-gui, et al. Stylus deformation calibration and scale value extraction of REVO five-axis measuring system. Journal of Measurement Science and Instrumentation, 2017, 8(3)： 223-227. ［doi： 10.3969／j.issn.1674-8042.2017-03-03］

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