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Development of High-Thrust and Double-Sided Linear Synchronous Motor Module For Liquid Crystal Display Equipment

Myung-jin CHUNG1,  Sang-yeon HWANG2


1.Dept. of Mechatronics Engineering, Korea Polytechnic University, Shihung, Korea2.Dept. of Research & Development, TSA Co., Ltd, Bucheon, Korea


 
Abstract— Recently, there is an increasing requirement for controlling linear motion up to a few hundred of millimeter strokes in the area of the liquid crystal display (LCD) production equipment. The requirements of the motion system for LCD production equipment are high acceleration and high velocity with positioning accuracy. To satisfy these requirements, it has to be designed with the high-thrust force and low velocity ripple. In this work, high-thrust and double-sided linear synchronous motor (LSM) module is proposed and the developed high-thrust and double-sided LSM module is verified by performance test.


Keywords—high-thrust; double-sieded; linear synchronous motor; module; LCD equipment


Manuscript Number: 1674-8042(2010)supp.-0114-04


dio: 10.3969/j.issn1674-8042.2010.supp..31

 

References


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[4] M.J. Chung and D.G. Gweon, 2005. Nano positioning system using trajectory following control method with cogging force model. Proc.  ISNM, p. 74.
 

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