FAN Jun-xia（樊俊霞）1,2， LI Xin-e（李新娥）1,2
(1. Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China; 2. Key Laboratory of Instrumentation Science & Dynamic Measurement（North University of China）, Ministry of Education, Taiyuan 030051, China)
Abstract：This paper presents working principle, structure and a dynamic calibration method of capacitive pressure measuring device. Using this method, placing calibrated capacitive electronic pressure measuring device and three standard sensors in simulation chamber pressure generator is proper and the data generated by them are analyzed and compared. This calibration method realizes dynamic calibration of capacitive electronic pressure measuring device under actual working pressure; pressure signal and frequency spectrum are analyzed. The experimental results show that simulation chamber pressure calibration method is feasible.
Key words：chamber pressure generator; dynamic calibration; rising edge; linearity
CLD number： TP212 Document code： A
Article ID： 1674-8042(2013)01-0001-05doi： 10.3969/j.issn.1674-8042.2013.01.001
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