WU Guo-qiang(吴国强)1,2, XU De-hui(徐德辉)1, XIONG Bin(熊斌)1, WANG Yue-lin(王跃林)1
(1. State Key Laboratory of Transducer Technology, Science and Technology on Micro-system Laboratory,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2. University of Chinese Academy of Sciences (UCAS), Beijing 100190, China)
Abstract： A 4.13 MHz reference oscillator incorporating a capacitive single-crystal-silicon (SCS) micromechanical resonator is presented. The microresonator is fabricated using a cavity-silicon-on-insulator (cavity-SOI) process and is excited in the Lamé mode with electrostatic driving and capacitive sensing. The Lamé mode may be described as a square plate that is contracting along one axis in the fabrication plane, while simultaneously extending along an orthogonal axis in the same plane. The microresonator exhibits a quality factor as high as 1.4×106 and a resonant frequency of 4.13 MHz at a pressure of 0.08 mbar. The output spectrum of the oscillator shows that the silicon micromechanical resonator is adapted as a timing element for a precision oscillator.
Key words：single-crystal-silicon (SCS); microresonator; oscillator; microelectromechanical systems (MEMS); bulk acoustic resonators
CLD number： TN752 Document code： A
Article ID： 1674-8042(2013)02-0132-04 doi： 10.3969/j.issn.1674-8042.2013.02.007
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