Osama Terra1, Hatem Hussein1, Mohamed Amer2
(1. Primary Length Standard and Laser Technology Laboratory, National Institute for Standard (NIS), Giza 12211-136, Egypt;2. Engineering and Surface Metrology Laboratory, National Institute for Standard (NIS), Giza 12211-136, Egypt)
Abstract： This paper discussed the main parameters contributing to the measurement uncertainty of interferometric distance meter (IDM). A simple and robust set-up is used to measure distance of about 12 cm with an expanded uncertainty (k=2) of ± 16.4 μm. The measurement uncertainty is found to be limited by the wavelength measurement accuracy. This set-up can be used to measure distances up to 56 m. It also enables easy determination of the point of equal path difference between the measuring and the reference arms. LabVIEW program is used for counting of the fringes and applying fast Fourier transformation (FFT) to perform frequency selective filtration to the noise. Although the reported uncertainty does not represent the state-of-art uncertainty reached for similar distance, the measurement provides traceable measurement to the unit of length, the meter.
Key words： distance measurement; length measurement; optical interferometer
CLD number： TM9320.12+6 Document code： A
Article ID： 1674-8042(2014)03-0073-06 doi： 10.3969/j.issn.1674-8042.2014.03.014
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干涉测距仪测量不确定度评估
Osama Terra1, Hatem Hussein1, Mohamed Amer2
(1. Primary Length Standard and Laser Technology Laboratory, National Institute for Standard (NIS), Giza 12211-136, Egypt;2. Engineering and Surface Metrology Laboratory, National Institute for Standard (NIS), Giza 12211-136, Egypt)
摘要:本文对与干涉测距仪（IDM）测量不确定度有关的参数进行了讨论。 采用一个简单、 鲁棒装置测量了约12 cm距离， 扩展不确定性为 ± 16.4 μm， 发现测量不确定度受波长测量精度制约。 该设置可测量距离达56 m， 它也能够轻松确定测量臂和参考臂之间等光程差的点。 LabVIEW程序用于条纹的计数， 快速傅立叶变换（FFT）对噪声按频率进行选择性过滤。 虽然本文对不确定性的测定不能代表同类测量距离的最高不确定度， 但该测量方法提供了可溯源于长度单位为米的测量值。
关键词:距离测量； 长度测量； 光学干涉仪
引用格式：Terra O, Hussein H, Amer M. Evaluation of an interferometric distance meter. Journal of Measurement Science and Instrumentation, 2014, 5(3): 73-78. [doi: 10.3969/j.issn.1674-8042.2014.03.014]
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