WANG Jinli(汪金礼)1, SU Yahui(苏亚辉)1,CUI Hongtao(崔洪涛)1,
YANG Liang(杨亮)2, FANG Zhiwei(方志伟)3
(1. School of Electrical Engineering and Automation, Anhui University, Hefei 230601, China;2. Dept. of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China;3. School of Physics and Material Science, Anhui University, Hefei 230601, China)
Abstract:In order to improve femtosecond laser throughput, a parallel processing system consisting of liquid crystal on silicon (LCOS) device as spatial light modulator is put forward. A method is described for displaying Fourier hologram on LCOS, and a high uniformity of several diffraction peaks in the computer reconstruction is achieved. Application of this method to the parallel femtosecond laser processing is also demonstrated, and two intersecting rings and three tangent rings are fabricated respectively by one time in the photoresist.
Key words:femtosecond laser; parallel processing; liquid crystal on silicon(LCOS); Fourier hologram; GerchbergSaxton(GS) algorithm
CLD number: TN242 Document code: A
Article ID: 16748042(2012)03030403 doi: 10.3969/j.issn.16748042.2012.03.021
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