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Piezoresistive detector for MEMS accelerometer displacement sensing

B. Rajesh Kumar1, D V R Koti Reddy2

 

(1. GITAM University, Visakhapatnam 530 045, India; 2. Andhra University, Visakhapatnam 530 003, India)

 

Abstract:We have designed a piezoresistive detector to detect the displacement of an accelerometer. We have used a flexible contact force and impact time detector for sensing the acceleration in the time domain. The advantage of using this mechanism is good linearity, compactness, scalability, and the potential to realize a higher precision accelerometer due to time-based measurement. The estimated mechanical and electrical parameters of beam detector are presented. We used COMSOL Multiphysics for designing the detector and Matlab for analysis.

 

Key words:piezoresistive detector; time-based accelerometer; force detector

 

CLD number: TP212.9 Document code: A

 

Article ID: 1674-8042(2012)03-0224-04  doi: 10.3969/j.issn.1674-8042.2012.03.005

 

References

 

[1] Rajaramana V, Haua B S, Rochab L A, et al. Design and modeling of a  contact-mode piezoresistive detector for time- based acceleration sensing. Proc. of Eurosensors XXIV Conference, 2010, 5: 1063-1066.
[2] Yang H, Pakula L, French P J. A novel operation mode for accelerometers. Proc. of Pacific RIM Workshop on Transducers and Micro/Nano Technologies, 2002: 303-306.
[3] Rocha L A. Dynamics and nonlinearities of the electro-mechanical coupling in inertial MEMS. PhD Dissertation, Delft University of Technology, Delft, Netherlands, 2005.
[4] Rocha L A, Mol L, Wolffenbutte R F, et al. A time based micro-G accelerometer. Proc. of Eurosensors XXII Conference, Dresden, Germany, 2008.
[5] Simulink-Simulation and model-based design software. [2012-02-10]. http://www.mathworks.com
[6] COMSOL Multiphysics FEA software.[2011-07-25]. http://: www.comsol.com
[7] Dias R A, Cretu E, Wolffenbuttel R, et al. Characterization of a pull-in based μG accelerometer, Proc. of  Eurosensors XXIV Conference, Linz, Austria, 2010, 5: 1075-1078.
[8] Matlab. [2011-02-30]. http://www.mathworks.com.

 


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