LI Zhi-yong, FENG Li, YANG Jun-tao, FAN Li-yu
(College of Material Science and Engineering, North University of China, Taiyuan 030051, China)
Abstract： Spectrum analysis of the plasma has over the years been growing both in methods and instrument, which makes it become a widely used non-contact detection method, without disturbing the arc plasma itself. With noticeable developments in the industry application of the method, a need for careful analysis of the plasma with both time and space identification is desirable. Therefore, a spectral measurement system is developed in this paper for diagnosing arc plasma with time and space identification. With a new hollow probe scanning method, the instrument can be used to provide information like energy distribution of plasma, temperature within the arc plasma, which are of great significance with the requirement of space identification. Furthermore, the system can also be used to capture the instant state of the arc plasma with the synchronic triggering system, which uses high speed photo and electrical signal as the time criterion. The industry applications prove that the system works well for online detection of the arc plasma.
Key words： spectrum; plasma; time identification; space identification
CLD number： O433.1Document code： A
Article ID： 1674-8042（2015）01-0075-08 doi： 10.3969/j.issn.1674-8042.2015.01.014
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一种具有时间和空间分辨的等离子体光谱测量系统
李志勇, 冯立, 杨军涛, 范力予
（中北大学 材料科学与工程学院， 太原 山西 030051）
摘要:等离子体光谱分析技术和设备作为一种非介入式测量方法， 不干扰等离子体本身， 在近年来得到广泛应用。 随着其工业应用的增加， 能够实现空间和时间分辨的光谱检测方法和装置越来越重要。 因此， 本文提出了一种能实现空间和时间分辨的等离子体光谱检测方法。 采用中空探针法实现空间分辨光谱诊断， 可以获得等离子体能量分布、等离子体内温度测量等功能。 同时， 本方法采用多信息同步采集触发方法， 将等离子体电信号和高速摄像信息作为时间标尺， 实现对等离子体瞬时状态的时间分辨分析。 工业应用表明本文的方法可以很好地应用于等离子体的在线诊断。
关键词:光谱； 等离子体； 时间分辨； 空间分辨
引用格式：LI Zhi-yong, FENG Li, YANG Jun-tao, et al. A spectrum measurement system for arc plasma with time and spatial indentification. Journal of Measurement Science and Instrumentation, 2015, 6(1)： 75-82. ［doi： 10.3969／j.issn.1674-8042.2015.01.014］
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